Types:
SupportProgram
Origins:
/Bund/UBA/UFORDAT
Tags:
Edelgas
?
Silizium
?
Solarzelle
?
Bodendegradation
?
Abscheidung
?
Reaktor
?
Wirkungsgrad
?
Halbleiter
?
Plasmadeposition
?
Siliziumfilm-amorph
?
Stabilitaet
?
Substrattemperaturen
?
Verdünnung
?
Region:
Hessen
Bounding boxes:
9° .. 9° x 50.55° .. 50.55°
License: cc-by-nc-nd/4.0
Language: Deutsch
Organisations
Time ranges:
1993-01-01 - 1997-09-30
Status
Quality score
- Overall: 0.44
-
Findability: 0.44
- Title: 0.00
- Description: 0.00
- Identifier: false
- Keywords: 0.62
- Spatial: RegionIdentified (1.00)
- Temporal: true
-
Accessibility: 0.67
- Landing page: Specific (1.00)
- Direct access: false
- Publicly accessible: true
-
Interoperability: 0.00
- Open file format: false
- Media type: false
- Machine-readable metadata: false
- Machine-readable data: false
-
Reusability: 0.67
- License: ClearlySpecifiedAndFree (1.00)
- Contact info: false
- Publisher info: true
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